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Review of MEMS Test Structures for Mechanical Parameter Extraction

This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are high...

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Furkejuvvon:
Váldodahkkit: A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra
Materiálatiipa: Artigo
Giella:Inglês
Almmustuhtton: Sumy State University 2011-01-01
Ráidu:Журнал нано- та електронної фізики
Fáttát:
MEMS Test Structures
Residual Stress
Stress Gradient
Young’s Modulus
Poisson Ratio
Pull- In Voltage
Liŋkkat:http://jnep.sumdu.edu.ua/download/numbers/2011/1,%20Part%202/articles/jnep_2011_V3_N1(Part2)_243-253.pdf
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