Review of MEMS Test Structures for Mechanical Parameter Extraction
This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are high...
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| Autori principali: | , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sumy State University
2011-01-01
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| Serie: | Журнал нано- та електронної фізики |
| Soggetti: | |
| Accesso online: | http://jnep.sumdu.edu.ua/download/numbers/2011/1,%20Part%202/articles/jnep_2011_V3_N1(Part2)_243-253.pdf |
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