Scanning effects in coherent fourier scatterometry
Incoherent Fourier Scatterometry (IFS) is a successful tool for high accuracy nano-metrology. As this method uses only far field measurements, it is very convenient from the point of view of industrial applications. A recent development is Coherent Fourier Scatterometry (CFS) in which incoherent ill...
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| Hlavní autoři: | , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
EDP Sciences
2012-01-01
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| Edice: | Journal of the European Optical Society-Rapid Publications |
| Témata: | |
| On-line přístup: | https://jeos.edpsciences.org/articles/jeos/pdf/2012/01/jeos20120712031.pdf |
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