Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
An extension of Fourier scatterometry is presented, aiming at increasing the sensitivity by measuring the phase difference between the reflections polarized parallel and perpendicular to the plane of incidence. The ellipsometric approach requires no additional hardware elements compared with convent...
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| Hauptverfasser: | , , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
EDP Sciences
2015-01-01
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| Schriftenreihe: | Journal of the European Optical Society-Rapid Publications |
| Schlagworte: | |
| Online-Zugang: | https://jeos.edpsciences.org/articles/jeos/pdf/2015/01/jeos20151015002.pdf |
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