Scanning effects in coherent fourier scatterometry

Incoherent Fourier Scatterometry (IFS) is a successful tool for high accuracy nano-metrology. As this method uses only far field measurements, it is very convenient from the point of view of industrial applications. A recent development is Coherent Fourier Scatterometry (CFS) in which incoherent ill...

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מידע ביבליוגרפי

Principais autores:	Roy S., El Gawhary O., Kumar N., Pereira S. F., Urbach H. P.
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	EDP Sciences 2012-01-01
סדרה:	Journal of the European Optical Society-Rapid Publications
נושאים:	scatterometry grating lithography inspection coherence nanopositioning
גישה מקוונת:	https://jeos.edpsciences.org/articles/jeos/pdf/2012/01/jeos20120712031.pdf
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