Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors

High temperature characteristics of langasite surface acoustic wave (SAW) devices coated with an AlN thin film have been investigated in this work. The AlN films were deposited on the prepared SAW devices by mid-frequency magnetron sputtering. The SAW devices coated with AlN films were measured from...

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Библиографические подробности

Главные авторы:	Lin Shu, Bin Peng, Yilin Cui, Dongdong Gong, Zhengbing Yang, Xingzhao Liu, Wanli Zhang
Формат:	Artigo
Язык:	Inglês
Опубликовано:	MDPI AG 2016-09-01
Серии:	Sensors
Предметы:	langasite AlN coating layer high temperature temperature coefficient of frequency
Online-ссылка:	http://www.mdpi.com/1424-8220/16/9/1436
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