Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors
High temperature characteristics of langasite surface acoustic wave (SAW) devices coated with an AlN thin film have been investigated in this work. The AlN films were deposited on the prepared SAW devices by mid-frequency magnetron sputtering. The SAW devices coated with AlN films were measured from...
Na minha lista:
| Principais autores: | , , , , , , |
|---|---|
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI AG
2016-09-01
|
| 叢編: | Sensors |
| 主題: | |
| 在線閱讀: | http://www.mdpi.com/1424-8220/16/9/1436 |
| 標簽: |
沒有標簽, 成為第一個標記此記錄!
|