An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors
The impact of device parameters, including AlN film thickness (<i>h</i><sub>AlN</sub>), number of interdigital transducers (<i>N</i><sub>IDT</sub>), and acoustic propagation direction, on the performance of <i>c</i>-plane AlN/sapphire-based SAW temperature sensors with an acoustic wavelength (<i>λ</...
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| Автори: | , , , , , , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
MDPI AG
2021-12-01
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| Серія: | Micromachines |
| Предмети: | |
| Онлайн доступ: | https://www.mdpi.com/2072-666X/13/1/40 |
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