Growth of stable SiC2N2-Si2CN4 phases during nitrogen incorporated sputter deposition of silicon carbide
The incorporation of nitrogen during sputtering of silicon carbide (SiC) target facilitates formation of different technologically significant phases. The bonding nature in these phases serve as the means of enhancing the hardness and toughness of the overall film getting deposited as shown by nano...
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Elsevier
2024-06-01
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| Series: | Chemical Physics Impact |
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| Acceso en liña: | http://www.sciencedirect.com/science/article/pii/S2667022423002931 |
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