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Novel Deposition Technique for Fabricating Films with Customized Thickness Profiles

This study introduces a novel deposition technique capable of depositing thin films with any arbitrary thickness profile. The apparatus consists of a fixed shadow mask and a rotating sample carrier plate. The shadow mask features a specifically designed opening curve that corresponds to the particul...

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שמור ב:
Principais autores: Chi-Yung Hsieh, Yu-Chi Lin, Xuan-Shan Huang, Jing-Ting Lin, Cheng-Sheng Huang
פורמט: Artigo
שפה:Inglês
יצא לאור: MDPI AG 2024-11-01
סדרה:Micromachines
נושאים:
shadow mask
gradient thickness
linear variable filter
film deposition
גישה מקוונת:https://www.mdpi.com/2072-666X/15/12/1412
תגים: הוספת תג
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