Novel Deposition Technique for Fabricating Films with Customized Thickness Profiles
This study introduces a novel deposition technique capable of depositing thin films with any arbitrary thickness profile. The apparatus consists of a fixed shadow mask and a rotating sample carrier plate. The shadow mask features a specifically designed opening curve that corresponds to the particul...
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| Autori principali: | , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2024-11-01
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| Serie: | Micromachines |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2072-666X/15/12/1412 |
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