CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequency (RF front-end, filters, timing, and frequency...

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Hlavní autoři:	Anurag Zope, Sheng-Shian Li
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Frontiers Media S.A. 2022-06-01
Edice:	Frontiers in Mechanical Engineering
Témata:	CMOS-MEMS thermal-piezoresistive resonator (TPR) thermal-piezoresistive oscillator (TPO) resonant sensor mass sensor pressure sensor
On-line přístup:	https://www.frontiersin.org/articles/10.3389/fmech.2022.898668/full
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