CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequency (RF front-end, filters, timing, and frequency...

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Detalhes bibliográficos

Principais autores:	Anurag Zope, Sheng-Shian Li
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Frontiers Media S.A. 2022-06-01
coleção:	Frontiers in Mechanical Engineering
Assuntos:	CMOS-MEMS thermal-piezoresistive resonator (TPR) thermal-piezoresistive oscillator (TPO) resonant sensor mass sensor pressure sensor
Acesso em linha:	https://www.frontiersin.org/articles/10.3389/fmech.2022.898668/full
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