CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors
Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequency (RF front-end, filters, timing, and frequency...
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| Autors principals: | , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Frontiers Media S.A.
2022-06-01
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| Col·lecció: | Frontiers in Mechanical Engineering |
| Matèries: | |
| Accés en línia: | https://www.frontiersin.org/articles/10.3389/fmech.2022.898668/full |
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