Carré Phase Shifting Algorithm for Wavelength Scanning Interferometry

Wavelength scanning interferometry is an interferometric technique for measuring surface topography without the well-known 2π phase ambiguity limitation. The measurement accuracy and resolution of this technique depends, among other factors, on the algorithm used to evaluate its sinusoidal interfere...

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Autors principals:	Hussam Muhamedsalih, Dawei Tang, Prashant Kumar, Xiangqian Jiang
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2022-02-01
Col·lecció:	Machines
Matèries:	wavelength scanning interferometer Fourier transformer Carré algorithm least squares fitting
Accés en línia:	https://www.mdpi.com/2075-1702/10/2/116
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