Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. Howeve...

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Bibliografische Detailangaben

Hauptverfasser:	Dongxu Wu, Fusheng Liang, Chengwei Kang, Fengzhou Fang
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2021-02-01
Schriftenreihe:	Micromachines
Schlagworte:	vertical scanning interferometry algorithm low coherence envelope detection surface topography height measurement
Online-Zugang:	https://www.mdpi.com/2072-666X/12/2/164
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