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Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. Howeve...

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Principais autores: Dongxu Wu, Fusheng Liang, Chengwei Kang, Fengzhou Fang
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2021-02-01
coleção:Micromachines
Assuntos:
vertical scanning interferometry
algorithm
low coherence
envelope detection
surface topography
height measurement
Acesso em linha:https://www.mdpi.com/2072-666X/12/2/164
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