Analysis on Elliptic and Parabolic 2-DOF Flexure Hinges for Spatial Positioning Stages
With advancements in semiconductor manufacturing processes and the development of precision processing technology, flexure hinge-based ultra-precision positioning stages are widely used. In the flexure hinge, axial and bending stiffness properties greatly influence positioning performance. This stud...
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| Asıl Yazarlar: | , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Korean Society for Precision Engineering
2023-03-01
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| Seri Bilgileri: | 한국정밀공학회지 |
| Konular: | |
| Online Erişim: | http://www.jkspe.or.kr/upload/pdf/NODE11219129.pdf |
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