Analysis of the Cylindrical Flexure Hinges with Circular Notches
Flexure hinges are widely used as joint linkages for precision stages applied to lithography processes. Among them, precision stages with 3 DOF (Degrees of Freedom) of x, y and θz prevail in semiconductor manufacturing and they have been adopting single directional flexure hinges as mechanical linka...
Wedi'i Gadw mewn:
| Prif Awdur: | |
|---|---|
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
Korean Society for Precision Engineering
2022-02-01
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| Cyfres: | 한국정밀공학회지 |
| Pynciau: | |
| Mynediad Ar-lein: | http://www.jkspe.or.kr/upload/pdf/NODE11028920.pdf |
| Tagiau: |
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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