Analysis on Elliptic and Parabolic 2-DOF Flexure Hinges for Spatial Positioning Stages

With advancements in semiconductor manufacturing processes and the development of precision processing technology, flexure hinge-based ultra-precision positioning stages are widely used. In the flexure hinge, axial and bending stiffness properties greatly influence positioning performance. This stud...

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Autors principals:	Hyun-Pyo Shin, Jun-Hee Moon
Format:	Artigo
Idioma:	Inglês
Publicat:	Korean Society for Precision Engineering 2023-03-01
Col·lecció:	한국정밀공학회지
Matèries:	axial stiffness bending stiffness finite element analysis elliptic flexure hinge parabolic flexure hinge
Accés en línia:	http://www.jkspe.or.kr/upload/pdf/NODE11219129.pdf
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