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A Differential Phase-Modulated Interferometer with Rotational Error Compensation for Precision Displacement Measurement

In this paper, a differential phase-modulated interferometer (DPMI) is proposed to compensate for the rotational error for precision displacement measurement. In DPMI, a reference interferometer sharing the same reference arm with the measurement interferometer is constructed. Using the two interfer...

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Principais autores: Liping Yan, Yucen Yan, Benyong Chen, Yingtian Lou
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2022-05-01
Serier:Applied Sciences
Fag:
differential interferometer
phase-modulated interferometer
precision displacement measurement
environmental disturbance
rotational error compensation
Online adgang:https://www.mdpi.com/2076-3417/12/10/5002
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