Compensation Method for Polarization Mixing in the Homodyne Interferometer
A homodyne interferometer is one of the most important tools in nanometre measurements. However, its nonlinear error seriously affects measurement accuracy at the sub-nanometre level. As one of the dominant factors that cause nonlinear error in a homodyne interferometer with a quadrature detector sy...
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| Hauptverfasser: | , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2020-09-01
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| Schriftenreihe: | Applied Sciences |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/2076-3417/10/17/6060 |
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