A Differential Phase-Modulated Interferometer with Rotational Error Compensation for Precision Displacement Measurement

In this paper, a differential phase-modulated interferometer (DPMI) is proposed to compensate for the rotational error for precision displacement measurement. In DPMI, a reference interferometer sharing the same reference arm with the measurement interferometer is constructed. Using the two interfer...

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Hlavní autoři:	Liping Yan, Yucen Yan, Benyong Chen, Yingtian Lou
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2022-05-01
Edice:	Applied Sciences
Témata:	differential interferometer phase-modulated interferometer precision displacement measurement environmental disturbance rotational error compensation
On-line přístup:	https://www.mdpi.com/2076-3417/12/10/5002
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