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A Two-Stage Unet Framework for Sub-Resolution Assist Feature Prediction

Sub-resolution assist feature (SRAF) is a widely used resolution enhancement technology for improving image contrast and the common process window in advanced lithography processes. However, both model-based SRAF and rule-based SRAF methods suffer from challenges of adaptability or high computationa...

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Principais autores: Mu Lin, Le Ma, Lisong Dong, Xu Ma
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2025-11-01
coleção:Micromachines
Assuntos:
sub-resolution assist feature
two-stage Unet
adaptive hybrid attention mechanism
warm-up cosine annealing algorithm
Acesso em linha:https://www.mdpi.com/2072-666X/16/11/1301
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