A Two-Stage Unet Framework for Sub-Resolution Assist Feature Prediction

Sub-resolution assist feature (SRAF) is a widely used resolution enhancement technology for improving image contrast and the common process window in advanced lithography processes. However, both model-based SRAF and rule-based SRAF methods suffer from challenges of adaptability or high computationa...

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I tiakina i:

Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua:	Mu Lin, Le Ma, Lisong Dong, Xu Ma
Hōputu:	Artigo
Reo:	Inglês
I whakaputaina:	MDPI AG 2025-11-01
Rangatū:	Micromachines
Ngā marau:	sub-resolution assist feature two-stage Unet adaptive hybrid attention mechanism warm-up cosine annealing algorithm
Urunga tuihono:	https://www.mdpi.com/2072-666X/16/11/1301
Ngā Tūtohu:	Tāpirihia he Tūtohu Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!

A Two-Stage Unet Framework for Sub-Resolution Assist Feature Prediction

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