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Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures

Microfabrication technology with quartz crystals is gaining importance as the miniaturization of quartz MEMS devices is essential to ensure the development of portable and wearable electronics. However, until now, there have been no reports of dimension compensation for quartz device fabrication. Th...

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Principais autores: Yide Dong, Guangbin Dou, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang, Litao Sun
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2024-06-01
coleção:Micromachines
Assuntos:
quartz
MEMS
wet etching undercut
dimension compensation
microfabrication
Acesso em linha:https://www.mdpi.com/2072-666X/15/6/784
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