Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures

Microfabrication technology with quartz crystals is gaining importance as the miniaturization of quartz MEMS devices is essential to ensure the development of portable and wearable electronics. However, until now, there have been no reports of dimension compensation for quartz device fabrication. Th...

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Hlavní autoři:	Yide Dong, Guangbin Dou, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang, Litao Sun
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2024-06-01
Edice:	Micromachines
Témata:	quartz MEMS wet etching undercut dimension compensation microfabrication
On-line přístup:	https://www.mdpi.com/2072-666X/15/6/784
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