On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition

Abstract This work presents a study of piezoelectric zinc oxide (ZnO) thin films deposited by a novel post‐reactive sputtering method. The process utilizes a rotating drum with DC magnetron sputtering deposition onto substrates with subsequent DC plasma‐assisted oxidation of the deposited metal to m...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	Michael McKinlay, Lewis Fleming, Manuel Pelayo García, Lucía Nieto Sierra, Pilar Villar Castro, Daniel Araujo, Basilio Javier García, Des Gibson, Carlos García Nuñez
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	Wiley-VCH 2024-11-01
Sarja:	Advanced Materials Interfaces
Aiheet:	optoelectronics piezoelectrics plasma physics plasma‐assisted magnetron sputtering, PVD thin film deposition zinc oxide
Linkit:	https://doi.org/10.1002/admi.202400252
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