A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications
Abstract Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow measurements. However, traditional TTUFs are usually based on a bulk piezoelectric transducer, which limits their application in small-diameter channels. In this paper, we developed a miniaturized TTU...
Sábháilte in:
| Príomhchruthaitheoirí: | , , , , , , , |
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| Formáid: | Artigo |
| Teanga: | Inglês |
| Foilsithe / Cruthaithe: |
Nature Publishing Group
2023-04-01
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| Sraith: | Microsystems & Nanoengineering |
| Rochtain ar líne: | https://doi.org/10.1038/s41378-023-00518-y |
| Clibeanna: |
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