Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films
Ultrasound is widely applied in diverse domains, such as medical imaging, non-destructive evaluation, and acoustic communication. Piezoelectric micromachined ultrasonic transducers (PMUTs) capable of generating and receiving ultrasonic signals at the micrometer level have become a prominent technolo...
-д хадгалсан:
| Үндсэн зохиолчид: | , , , , , |
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| Формат: | Artigo |
| Хэл сонгох: | Inglês |
| Хэвлэсэн: |
MDPI AG
2024-08-01
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| Цуврал: | Micromachines |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://www.mdpi.com/2072-666X/15/8/1001 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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