Balanced truncation model reduction for laser heating wafer model in frequency restricted domain

Modeling and simulating laser heating phenomena are crucial for optimizing manufacturing processes and ensuring high-quality final products. A major challenge in semiconductor manufacturing is achieving accurate, real-time temperature control during wafer heating. To reduce the computational burden...

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Principais autores:	Md. Saiduzzaman, Md. Shafiqul Islam, Md. Sumon Hossain, M. Monir Uddin, Mohammad Osman Gani
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Elsevier 2024-12-01
coleção:	Franklin Open
Assuntos:	Laser heating wafer Balanced truncation Lyapunov equations Gramians Rational Krylov subspace
Acesso em linha:	http://www.sciencedirect.com/science/article/pii/S277318632400121X
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