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Reliability of MEMS inertial devices in mechanical and thermal environments: A review

The reliability of MEMS inertial devices applied in complex environments involves interdisciplinary fields, such as structural mechanics, material mechanics and multi-physics field coupling. Nowadays, MEMS inertial devices are widely used in the fields of automotive industry, consumer electronics, a...

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Principais autores: Yingyu Xu, Shuibin Liu, Chunhua He, Heng Wu, Lianglun Cheng, Guizhen Yan, Qinwen Huang
Formato: Artigo
Idioma:Inglês
Publicado em: Elsevier 2024-03-01
coleção:Heliyon
Assuntos:
MEMS inertial devices
Thermal reliability
Mechanical reliability
Multiphysics coupling
Failure modes and mechanisms
Acesso em linha:http://www.sciencedirect.com/science/article/pii/S2405844024035126
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