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3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product developme...

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Principais autores: Matthias Kahr, Harald Steiner, Wilfried Hortschitz, Michael Stifter, Andreas Kainz, Franz Keplinger
Format: Artigo
Jezik:Inglês
Izdano: MDPI AG 2018-11-01
Serija:Proceedings
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Online dostop:https://www.mdpi.com/2504-3900/2/13/784
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