Borosilicate Glass MEMS Lorentz Force Magnetometer
This paper reports on a novel, miniaturized magnetomechanical transducer/sensor made of borosilicate glass with wide dynamic range. The prototype is manufactured with laser micromachining and ablation techniques. Compared to state of the art, borosilicate glass substrate offers the highest thermal s...
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| Main Authors: | , , , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/788 |
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