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Low Resistivity and High Carrier Concentration in SnO<sub>2</sub> Thin Films: The Impact of Nitrogen–Hydrogen Annealing Treatments

The tin dioxide (SnO<sub>2</sub>) thin films in this work were prepared by using plasma-enhanced atomic layer deposition (PEALD), and a systematic analysis was conducted to evaluate the influence of post-deposition annealing at various temperatures in a nitrogen–hydrogen mixed atmosphere on their su...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Prif Awduron: Qi-Zhen Chen, Zhi-Xuan Zhang, Wan-Qiang Fu, Jing-Ru Duan, Yu-Xin Yang, Chao-Nan Chen, Shui-Yang Lien
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI AG 2025-06-01
Cyfres:Nanomaterials
Pynciau:
Mynediad Ar-lein:https://www.mdpi.com/2079-4991/15/13/986
Tagiau: Ychwanegu Tag
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