Design and Modification of a High-Resolution Optical Interferometer Accelerometer
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which...
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| Główni autorzy: | , , , , , , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
MDPI AG
2021-03-01
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| Seria: | Sensors |
| Hasła przedmiotowe: | |
| Dostęp online: | https://www.mdpi.com/1424-8220/21/6/2070 |
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