Design and Modification of a High-Resolution Optical Interferometer Accelerometer

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Yuan Yao, Debin Pan, Jianbo Wang, Tingting Dong, Jie Guo, Chensheng Wang, Anbing Geng, Weidong Fang, Qianbo Lu
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2021-03-01
Schriftenreihe:	Sensors
Schlagworte:	MOEMS accelerometer interferometry diffraction gratings low-<i>g</i> accelerometer
Online-Zugang:	https://www.mdpi.com/1424-8220/21/6/2070
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