Design and Modification of a High-Resolution Optical Interferometer Accelerometer

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which...

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Principais autores:	Yuan Yao, Debin Pan, Jianbo Wang, Tingting Dong, Jie Guo, Chensheng Wang, Anbing Geng, Weidong Fang, Qianbo Lu
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2021-03-01
Series:	Sensors
Assuntos:	MOEMS accelerometer interferometry diffraction gratings low-<i>g</i> accelerometer
Acceso en liña:	https://www.mdpi.com/1424-8220/21/6/2070
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