Rapid Prototyping of Inertial MEMS Devices through Structural Optimization
In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device...
Kaydedildi:
| Asıl Yazarlar: | , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI AG
2021-07-01
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| Seri Bilgileri: | Sensors |
| Konular: | |
| Online Erişim: | https://www.mdpi.com/1424-8220/21/15/5064 |
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