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Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device...

Täydet tiedot

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Bibliografiset tiedot
Päätekijät: Daniele Giannini, Giacomo Bonaccorsi, Francesco Braghin
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MDPI AG 2021-07-01
Sarja:Sensors
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Linkit:https://www.mdpi.com/1424-8220/21/15/5064
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