PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates
A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb<sub>0.99</sub>□<sub>0.01</sub>(Zr<sub>0.52</sub>Ti<sub>0...
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| Hauptverfasser: | , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2026-04-01
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| Schriftenreihe: | Sensors |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/1424-8220/26/7/2246 |
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