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Multiple Ring Electrode-Based PMUT with Tunable Deflections

Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and sma...

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Detalhes bibliográficos
Principais autores: Jan Helmerich, Manfred Wich, Annika Hofmann, Thomas Schaechtle, Stefan Johann Rupitsch
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2025-05-01
coleção:Micromachines
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Acesso em linha:https://www.mdpi.com/2072-666X/16/6/623
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