Multiple Ring Electrode-Based PMUT with Tunable Deflections

Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and sma...

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Principais autores:	Jan Helmerich, Manfred Wich, Annika Hofmann, Thomas Schaechtle, Stefan Johann Rupitsch
格式:	Artigo
語言:	Inglês
出版:	MDPI AG 2025-05-01
叢編:	Micromachines
主題:	adjustable deflection characterization of piezoelectric materials multiple electrode design PMUT PZT annealing ultrasonic transducers
在線閱讀:	https://www.mdpi.com/2072-666X/16/6/623
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