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Multiple Ring Electrode-Based PMUT with Tunable Deflections

Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and sma...

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Autores principales: Jan Helmerich, Manfred Wich, Annika Hofmann, Thomas Schaechtle, Stefan Johann Rupitsch
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI AG 2025-05-01
Colección:Micromachines
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Acceso en línea:https://www.mdpi.com/2072-666X/16/6/623
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