SiGe/Si Multi-Quantum-Well Micro-Bolometer Array Design and Fabrication with Heterogeneous Integration

The micro-bolometer is important in the field of infrared imaging, although improvements in its performance have been limited by traditional materials. SiGe/Si multi-quantum-well materials (SiGe/Si MQWs) are novelty thermal-sensitive materials with a significantly high TCR and a comparably low 1/f n...

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Bibliografski detalji

Glavni autori:	Zhong Fang, Yong He, Zhequan Chen, Yunlei Shi, Junjie Jiao, Xuchao Pan
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2021-12-01
Serija:	Micromachines
Teme:	SiGe/Si MQWs micro-bolometer heterogeneous integration adhesive bonding
Online pristup:	https://www.mdpi.com/2072-666X/12/12/1553
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