Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication

This study presents a new design for a MEMS electrostatic speaker array with out-of-plane piston-like diaphragm displacement using a simplified silicon-on-insulator microfabrication process. The device comprises an array of parallel actuating membranes with small circular mechanically open but acous...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Diogo E. Aguiam, Inês S. Garcia, Edoardo Sotgiu, Filipe S. Alves
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2024-03-01
Schriftenreihe:	Proceedings
Schlagworte:	microspeaker MEMS acoustic impedance
Online-Zugang:	https://www.mdpi.com/2504-3900/97/1/101
Tags:	Tag hinzufügen Keine Tags, Fügen Sie das erste Tag hinzu!