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On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry

This paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromecha...

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Main Authors: Alessio Buzzin, Lorenzo Giannini, Gabriele Bocchetta, Andrea Notargiacomo, Ennio Giovine, Andrea Scorza, Rita Asquini, Giampiero de Cesare, Nicola Pio Belfiore
Format: Artigo
Language:Inglês
Published: MDPI AG 2023-12-01
Series:Micromachines
Subjects:
MEMS
NEMS
comb-drives
electrostatic actuator
flexure hinge
compliant
Online Access:https://www.mdpi.com/2072-666X/14/12/2229
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