A carregar...
Angled electrode comb drives for enhanced actuator in silicon photonic applications
Abstract This paper presents an in-depth analysis of electrostatic comb drives, specifically focusing on angled finger configurations to optimize performance for high-demand silicon photonic devices. The study contributes to the advancement of optical microsystems, particularly for beam steering con...
Na minha lista:
| Main Authors: | , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2025-10-01
|
| Colecção: | Microsystems & Nanoengineering |
| Acesso em linha: | https://doi.org/10.1038/s41378-025-00906-6 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|