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Angled electrode comb drives for enhanced actuator in silicon photonic applications
Abstract This paper presents an in-depth analysis of electrostatic comb drives, specifically focusing on angled finger configurations to optimize performance for high-demand silicon photonic devices. The study contributes to the advancement of optical microsystems, particularly for beam steering con...
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| Hlavní autoři: | , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Nature Publishing Group
2025-10-01
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| Edice: | Microsystems & Nanoengineering |
| On-line přístup: | https://doi.org/10.1038/s41378-025-00906-6 |
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