Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
Guardat en:
| Autors principals: | , , , , , |
|---|---|
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2022-11-01
|
| Col·lecció: | Photonics |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2304-6732/9/11/830 |
| Etiquetes: |
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|